Nanoimprint lithography
نویسندگان
چکیده
Nowadays, nanodevices like small fluidic channels, semiconductor lasers, nano contacts for solar cells, nano magnets or nano antennas for infrared detection (THz) are of great interest. The applications for these devices extend the fields of e.g. energy, computational or medical sciences. For example, by arranging nano dots consisting of a magnetic material, logical circuits can be designed which can lead to a novel computing device. The challenge which has to be solved is the design of low cost and fast process for the production of nano structures.
منابع مشابه
Pii: S0167-9317(96)00097-4
Nanoimprint lithography, a high-throughput, low-cost, nonconventional lithographic method proposed and demonstrated recently, has been developed and investigated. Nanoimprint lithography has demonstrated 10 nm feature size, 40 nm pitch, vertical and smooth sidewalls, and nearly 90 ° corners. Further experimental study indicates that the ultimate resolution of nanoimprint lithography could be su...
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